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    Location:Home ? MEMS Foundry ? MEMS foundry

    Photolithography: 1X Proximity/ contact, double Alignment, I-line stepper, Min CD 1um

    Thin film: Oxide, LPCVD, TEOS, PECVD

    Metal: Evaporation, Sputter

    Wet Etch: KOH, BOE/HF.

    Dry Etch: RIE, DRIE(D/W 40)

    Bond: Si-Si bond, Si-Glass bond, eutectic bond, Diffusion bond

    Piezoelectric material: AlN

    Release: VHF etch, XeF2 etch

    Wafer Thinning: Grind, CMP

    Copyright?2018 Zhejiang Mfab Co.,ltd.

    Tel: 0573-83955172 Fax: 0573-83956667

    E-mail:info@zjmfab.com   Zip code:314000

    Add:Building 2,No.551 Yazhong R.D.,Nanhu district,Jiaxing,Zhejiang